ESD-DLC film

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型號： ESD-DLC

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ESD(Static Dissipative)－DLC(diamond-like carbon coating)film

The current situation in the industry is that due to the shrinking size of semiconductor components and line width nanometers, the tolerance to static electricity decreases. That is, chips may be damaged by static electricity during advanced semiconductor manufacturing and packaging processes, affecting product yields, reliability, etc. Therefore, there is a need to have a better solution to enhance the static electricity protection capability of traditional carriers. ESD (Electrostatic Dissipation) solutions have been developed because of the inability of existing products to dissipate static electricity, low lifespan, high-cost, and lack of technology autonomy.

To resolve the effects of static electricity discharge on the products, Hanstech, Trusval, and ITRI have collaborated to develop a surface modified diamond-like carbon (ESD-DLC) film by using ion deposition in the high-level PVD (Physical Vapor Deposition) process to achieve excellent anti-static effects through the improved magnetic furnace arc ionization system. Hanstech's ESD-DLC film plays a critical role in the manufacturing process. It effectively suppresses the initial charge, allowing it to move more slowly to the ground or other conductors, significantly reducing the potential threat of static electricity to the product.

In addition, Hanstech DLC type drilling film follows the ANSI/ESD S541 resistance value classification standard, the surface impedance coefficient is between the insulating and conductive materials, which is a static dissipative material. It is mainly applied to the surface modification of metal.

Customized static dissipative diamond-like carbon coating(ESD-DLC)film

Specification items	content	Features
Coating material	DLC, Dimond-like Carbon	ESD-DLC
Coating color	black, gloss/matte	surface blackened
Coating technology	cathodic arc deposition	dense, 3D coating, low pollution, low-cost
Structure	multi-layer structure design	good adhesion, the film does not peel off easily
Thickness	0.5-10 µm	does not affect the original size of the object
Roughness (Ra)	0.05-0.15 µm	smooth surface, uniform thickness
Surface resistance / volume resistance	105-1010 ohm	Stable quality, customized service
High temperature resistance	Max. 270-300 oC	High temperature product process, can be used in high temperature environment
Coating hardness	20-30 Gpa	wear-resistant, scratch-resistant, prolonging the life of objects
Corrosion resistance	suitable for acid and alkali processes	good acid and alkali resistance, high chemical stability
Applicable objects	stainless steel, carbon steel, aluminum alloy or other conductive material Suitable for most conductive materials	Suitable for most conductive materials
Industrial application	Industrial application: semiconductor, IC, package testing, testing, transmission equipment and components, etc	High requirements for electrostatic protection, products or processes are sensitive to static electricity

Difference in Film Characteristics

Difference in Film Characteristics
#	ESD-DLC⭐	Dural anode
Hardness(HV)	2500-3500	500-1000
Flatness	High denseness, better	Low denseness, worse
Friction coefficient	Low	Higher
Adhesion	High, the film does not easily to peel off	Good, the film easily brittles
Temperature resistance	High, up to 300°C	Medium, can't be used for a long time
Coefficient of impedance (ohm)	10⁵-10⁹	10⁹-10¹⁴Low uniformity
Chemical stability	High, resistant to alkaline washing process	Low, not resistant to alkaline washing process

Static dissipative diamond-like carbon ( ESD-DLC ) Film layer/technology introduction

The Group’s Technical Cooperation with Industrial Technology Research Institute

Anti-static DLC Diamond-like Carbon Film using PVD Ionic Coating Technology

Among hard coatings, DLC coatings are widely used for their excellent performance. Hanstech utilizes a glow discharge method to excite the atoms of the target material. The material is deposited on the surface of the workpiece by the continuous impact of energized particles. This process produces an ESD-DLC film through the cathodic arc ion deposition technology in PVD, which results in a film with excellent uniformity, density, adhesion, and mechanical properties.

DLC-type drilling film is widely used in various kinds of workpieces, such as cutting tools, molds and dies, which can enhance the durability and performance of the tools. Especially in the application of semiconductor packaging board jigs and fixtures, Hanstech ESD-DLC diamond-like film can effectively improve the wear resistance and life of semiconductor advanced production and packaging process, to ensure the efficient operation of semiconductors. In addition, in biomedical equipment, diamond-like carbon films can provide excellent protection and reduce wear and tear of the equipment, thus increasing the lifetime and reliability.

Comparison of PVD coating production process and film characteristics

Physical Vapor Deposition (PVD) can be divided into Vacuum Evaporation, Sputtering, and Ion Plating, of which PVD coating is often referred to as Ion Plating. Hanstech adopts the ion plating technology in PVD coating. From the comparison table below, it can be concluded that the ion plating process energy and plating rate in PVD coating are better, and the adhesion and density of the film are better.

Process classification	Process characteristics			Film properties
Process classification	particle state	Energy (eV)	Plating rate (A/s)	adhesion	density
Evaporation	atom	0.1~1	100~75K	Very low	<80%
Sputtering	atom	1~10	25~15K	low	~80%
Ion Plating	atom	>10	100~250K	extremely high	>95%

Surface modified diamond-like carbon coating (DLC) with excellent acid and alkali resistance

Multi-layer structure design, amorphous structure

Increase adhesion and yield, and improve film toughness

The film layer has both high hardness and high elasticity

Hardness conversion table

Vickers	Brinell（HB）		Rockwell（HR）			Rockwell Superficial			Shore	tensile strength TS	Vicker	Brinell （HB）		Rockwell （HR）				Rockwell Superficial			Shore	tensile strength TS
HV	standard ball	hard ball	A	C	D	15N	30N	45N	HS	Mpa	HV	standard ball	Straight ball	A	B	C	D	15N	30N	45N	HS	Mpa
940	-	-	85.6	68.0	76.9	93.2	84.4	75.4	97		420	397	397	71.8		2.7	57.5	81.8	61.9	46.4	57	1370
920	-	-	85.3	67.5	76.5	93.0	84.0	74.8	96		410	388	388	71.4		41.8	56.8	81.4	61.1	45.3	-	1330
900	-	-	85.0	67.0	76.1	92.9	83.6	74.2	95		400	379	379	70.8		40.8	56.0	81.0	60.2	44.1	55	1290
880	-	(767)	84.7	66.4	75.7	92.7	83.1	73.6	93		390	369	369	70.3		39.8	55.2	80.3	59.3	42.9	-	1240
860	-	(757)	84.4	65.9	75.3	92.5	82.7	73.1	92		380	360	360	69.8	(110.0)	38.8	54.4	79.8	58.4	41.7	52	1205
840	-	(745)	84.1	65.3	74.8	92.3	82.2	72.2	91		370	350	350	69.2	-	3737	53.3	79	57.4	40.4	-	1170
820	-	(733)	83.8	64.7	74.3	92.1	81.7	71.8	90		360	341	341	68.7	(109.0)	36.6	52.8	78.6	56.4	39.1	50	1130
800	-	(722)	83.4	64.0	73.8	91.8	81.1	71.0	88		350	331	331	68.1	-	35.5	51.9	78.0	55.4	37.8	-	1095
780	-	(710)	83.0	63.3	73.3	91.5	80.4	70.2	89		340	322	322	67.6	(108.0)	34.4	51.1	77.4	54.4	36.5	47	1070
760	-	(698)	82.6	62.5	72.6	91.2	79.7	69.4	86		330	313	313	67.0	-	33.3	50.2	76.8	53.6	35.2	-	1035
740	-	(684)	82.2	61.8	72.1	91.0	79.1	68.6	84		320	303	303	66.4	(107.0)	32.2	49.4	76.2	52.3	33.9	45	1005
720	-	(670)	81.8	61.0	71.5	90.7	78.4	67.7	83		310	294	294	65.8	-	31.0	48.4	75.6	51.3	32.5	-	980
700	-	(656)	81.3	60.1	70.8	90.3	77.6	66.7	81		300	284	284	65.2	(105.5)	29.8	47.5	74.9	50.2	31.1	42	950
690	-	(647)	81.1	59.7	70.5	90.1	77.2	66.2	-		295	280	280	64.8	-	59.2	47.1	74.6	49.7	30.4	-	935
680	-	(638)	80.8	59.2	70.1	89.8	76.8	65.7	80		290	275	275	64.5	(104.5)	28.5	46.5	74.2	49.0	29.5	41	915
670	-	630	80.6	58.8	69.8	89.7	76.4	65.3	-		285	270	270	64.2	-	27.8	46.0	73.8	48.4	28.7	-	905
660	-	620	80.3	58.3	69.4	89.5	75.9	64.7	79		280	265	265	63.8	(103.5)	27.1	45.3	73.4	47.8	27.9	40	890
650	-	611	80.0	57.8	69.0	89.2	75.5	64.1	77		275	261	261	63.5	-	26.4	44.9	73.0	47.2	27.1	-	875
640	-	601	79.8	57.3	68.7	89.0	75.1	63.5	77		270	256	256	63.1	(102.0)	25.6	44.3	72.6	46.4	26.2	38	855
630	-	591	79.5	56.8	68.3	88.8	74.6	63.0	-		265	252	252	62.7	-	24.8	43.7	72.1	45.7	25.2	-	840
620	-	582	79.2	56.3	67.9	88.5	74.2	62.4	75		560	247	247	62.4	(101.0)	24.0	43.1	71.6	45.0	24.3	37	825
610	-	573	78.9	55.7	67.5	88.2	73.6	61.7	-		255	243	243	62.0	-	23.1	42.2	71.1	44.2	23.2	-	805
600	-	564	78.6	55.2	67.0	88.0	73.2	61.2	74		250	238	238	61.6	99.5	22.2	41.7	70.6	43.4	22.2	36-	795
590	-	554	78.4	54.7	66.7	87.8	72.7	60.5	-	2055	245	233	233	61.2	-	21.3	41.1	70.1	42.5	21.1	-	780
580	-	545	78.0	54.1	66.2	87.5	72.1	59.9	72	2020	240	228	228	60.7	98.1	20.3	40.6	69.6	41.7	19.9	34	765
570	-	535	77.8	53.6	65.8	87.2	71.7	59.3	-	1985	230	219	219	-	96.7	(18.0)	-	-	-	-	33	730
560	-	525	77.4	53.0	65.4	86.9	71.2	58.6	71	1950	220	209	209	-	96.0	(15.7)	-	-	-	-	32	695
550	(505)	517	77.0	52.3	64.8	86.6	70.5	57.8	-	1905	210	200	200	-	93.4	(13.4)	-	-	-	-	30	670
540	(496)	507	76.7	51.7	64.4	86.3	70.0	57.0	69	1860	200	190	190	-	91.5	(11.0)	-	-	-	-	29	635
530	(488)	497	76.4	51.1	63.9	86.0	69.5	56.2	-	1825	190	181	181	-	89.5	(8.5)	-	-	-	-	28	605
520	(480)	488	76.1	50.5	63.5	85.7	69.0	55.6	67	1795	180	171	171	-	87.1	(6.0)	-	-	-	-	26	580
510	(473)	479	75.7	49.8	62.9	85.4	68.3	54.7	-	1750	170	162	162	-	85.0	(3.0)	-	-	-	-	25	545
500	(465)	471	75.3	49.1	62.2	85.0	67.7	53.9	66	1705	160	152	152	-	81.7	(0.0)	-	-	-	-	24	515
490	(456)	460	74.9	48.4	61.6	84.7	67.1	53.1	-	1660	150	143	143	-	78.7	-	-	-	-	-	22	490
480	448	452	74.5	47.7	61.3	84.3	66.4	52.2	64	1620	140	133	133	-	75.0	-	-	-	-	-	21	455
470	441	442	74.1	46.9	60.7	83.9	65.7	51.3	-	1570	130	124	124	-	71.2	-	-	-	-	-	20	425
460	433	433	73.6	46.1	60.1	83.6	64.9	50.4	62	1530	120	114	114	-	66.7	-	-	-	-	-	-	390
450	425	425	73.3	45.3	59.4	83.2	64.3	49.4	-	1495	110	105	105	-	62.3	-	-	-	-	-	-	-
440	415	415	72.8	44.5	58.8	82.8	63.5	48.4	59	1460	100	95	95	-	56.2	-	-	-	-	-	-	-
430	405	405	72.3	43.6	58.2	82.3	62.7	47.4	-	1410	95	90	90	-	52.0	-	-	-	-	-	-	-
											90	86	86	-	48.0	-	-	-	-	-	-	-
											85	81	81	-	41.0	-	-	-	-	-	-	-

Remark：

The conversion table is compiled according to SAE J 417. The words in bold are the same as ASTM E 140, which are the joint adjustment results of SAE-ASM-ASTM.。
The values in brackets ( ) in the table are ranges that are unlikely to be used and are provided for reference only。
Approximate value of tensile strength, converted based on JIS Z 8413 and JIS Z 8438 (obsolete). When using, attention should be paid to the effects of quality, steel composition, heat treatment methods, etc.。

Unit conversion： 1 MPa ＝ 1 N/㎜ 2、1kgf/mm2 ＝ 9.8 MPa ＝ 9.8 N/㎜ 2 1 Ksi ＝ 1000 psi ＝ 0.7037 kgf/mm2＝ 6.89626 Mpa